Hierarchy view
microassembly
Description
Description
The assembly of nano, micro or mesoscale systems and components with dimensions between 1 µm to 1 mm. Because of the need for precision on a microscale, micro assemblies require reliable visual alignment equipment, such as ion beam imaging systems and stereo electronic microscopes, as well as precision tools and machines, such as microgrippers. The microsystems are assembled according to techniques of doping, thin films, etching, bonding, microlithography, and polishing.
Alternative Labels
assembly of mesoscale systems
assembly of microscale systems
assembly of nanoscale systems
micro-fabrication
micro-fabrication methods
micro-fabrication techniques
microassembly
microfabrication methods
microfabrication techniques
techniques of micro-fabrication
techniques of microfabrication
Skill type
knowledge
Skill reusability level
cross-sector skills and competences
Relationships
Broader concepts
Essential for
Optional for
Concept URI
Status
released
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