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The assembly of nano, micro or mesoscale systems and components with dimensions between 1 µm to 1 mm. Because of the need for precision on a microscale, micro assemblies require reliable visual alignment equipment, such as ion beam imaging systems and stereo electronic microscopes, as well as precision tools and machines, such as microgrippers. The microsystems are assembled according to techniques of doping, thin films, etching, bonding, microlithography, and polishing.

Alternative Labels

micro-fabrication methods


techniques of microfabrication

techniques of micro-fabrication

assembly of mesoscale systems

assembly of microscale systems

microfabrication methods


assembly of nanoscale systems

microfabrication techniques

micro-fabrication techniques